Force Measurement System in Ultra-High Vacuum Chamber for Analysis of Adhesion Phenomena -Anaylysis System of Adhesion Phenomena between Surfaces-

Publication Information

Title

Japanese:	超高真空中の高剛性力計測システムの構築－固体間凝着現象解析システムのあり方－
English:	Force Measurement System in Ultra-High Vacuum Chamber for Analysis of Adhesion Phenomena -Anaylysis System of Adhesion Phenomena between Surfaces-

Author

Japanese:	杉原憲一, 高橋邦夫, 恩澤忠男.
English:	杉原憲一, 高橋邦夫, 恩澤忠男.

Language

English

Journal/Book name

Japanese:
English:	5th symposium of Microjoining and Assembly Technology in Electronics (mate'99)

Volume, Number, Page

pp. 15-20

Published date

1999

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: