An ultrasonic micro motor using a bending transducer based on PZT thin film

Publication Information

Title

Japanese:
English:	An ultrasonic micro motor using a bending transducer based on PZT thin film

Author

Japanese:	Morita, T., Kurosawa, M., Higuchi, T..
English:	Morita, T., Kurosawa, M., Higuchi, T..

Language

English

Journal/Book name

Japanese:
English:	Sensors &Actuators, A.,(),,

Volume, Number, Page

Vol. 50 No. 1-2 pp. 75-80

Published date

1995

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: