Atomic Layer Metalorganic Chemical Vapor Deposition of YBa2Cu3OX with In Situ Optical Reflectance Measurement

Publication Information

Title

Japanese:
English:	Atomic Layer Metalorganic Chemical Vapor Deposition of YBa₂Cu₃O_X with In Situ Optical Reflectance Measurement

Author

Japanese:	Shunri Oda, Hideaki Zama, Shuu'ichirou Yamamoto.
English:	Shunri Oda, Hideaki Zama, Shuu'ichirou Yamamoto.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of the 7th Topical Meeting on Crystal Growth Mechanism

Volume, Number, Page

pp. 285-290

Published date

1994

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: