High rates and very low temperature fabrication of polycrystalline silicon from fluorinated source gas

Publication Information

Title

Japanese:
English:	High rates and very low temperature fabrication of polycrystalline silicon from fluorinated source gas

Author

Japanese:	T. Kamiya, K. Nakahata, K. Ro, C. M. Fortmann, I. Shimizu.
English:	T. Kamiya, K. Nakahata, K. Ro, C. M. Fortmann, I. Shimizu.

Language

English

Journal/Book name

Japanese:
English:	Mater. Res. Soc. Symp. Proc.

Volume, Number, Page

Vol. 557 pp. 513

Published date

1999

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: