Structural properties of polycrystalline silicon films having varied textures fabricated with intentional control of surface reactions using SiF4/H2/SiH4 mixing gas

Publication Information

Title

Japanese:
English:	Structural properties of polycrystalline silicon films having varied textures fabricated with intentional control of surface reactions using SiF₄/H₂/SiH₄ mixing gas

Author

Japanese:	T. Kamiya, K. Nakahata, C.M. Fortmann, I. Shimizu.
English:	T. Kamiya, K. Nakahata, C.M. Fortmann, I. Shimizu.

Language

English

Journal/Book name

Japanese:
English:	Journal of Non-Crystalline Solids

Volume, Number, Page

Vol. 266-269 pp. 120

Published date

2000

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: