Preparation of Bismuth Silicate Films on Si Wafer by Metalorganic Chemical Vapor Deposition

Publication Information

Title

Japanese:
English:	Preparation of Bismuth Silicate Films on Si Wafer by Metalorganic Chemical Vapor Deposition

Author

Japanese:	Jong Hee Kim, Takaaki Tsurumi, Hideyuki Hirano, Toshio Kamiya, Nobuyasu Mizutani, Masaki Daimon.
English:	Jong Hee Kim, Takaaki Tsurumi, Hideyuki Hirano, Toshio Kamiya, Nobuyasu Mizutani, Masaki Daimon.

Language

English

Journal/Book name

Japanese:
English:	Jpn. J. Appl. Phys.

Volume, Number, Page

Vol. 32 pp. 135

Published date

1993

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: