Effects of Ion Bombardment to Interfaces on Residual Internal Stress and Crystallite Structure on Multilayered Films

Publication Information

Title

Japanese:
English:	Effects of Ion Bombardment to Interfaces on Residual Internal Stress and Crystallite Structure on Multilayered Films

Author

Japanese:	Y. Miyamoto, K. Watanabe, 中川茂樹, M. Naoe.
English:	Y. Miyamoto, K. Watanabe, S. Nakagawa, M. Naoe.

Language

English

Journal/Book name

Japanese:
English:	Vacuum

Volume, Number, Page

Vol. 51 No. 4 pp. 711-714

Published date

1998

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: