Analysis of Stray Magnetic Field at the Substrate and Effect of Applying External Magnetic Field in Facing Targets Sputtering

Publication Information

Title

Japanese:
English:	Analysis of Stray Magnetic Field at the Substrate and Effect of Applying External Magnetic Field in Facing Targets Sputtering

Author

Japanese:	T. Ichihara, 中川茂樹, M. Naoe.
English:	T. Ichihara, S. Nakagawa, M. Naoe.

Language

English

Journal/Book name

Japanese:
English:	Vacuum

Volume, Number, Page

Vol. 51 No. 4 pp. 715-718

Published date

1998

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: