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Title
Japanese:ダイヤモンド膜上への圧電体膜の合成 
English: 
Author
Japanese: 森　義博, 平田　敦, 戸倉　和, 吉川昌範.  
English: 森　義博, 平田　敦, 戸倉　和, 吉川昌範.  
Language Japanese 
Journal/Book name
Japanese:精密工学会誌 
English:Journal of the Japan Society for Precision Engineering 
Volume, Number, Page Vol. 62    No. 12    pp. 1788-1789
Published date 1996 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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