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Title
Japanese:球支持磁力駆動微動ステージの試作 
English: 
Author
Japanese: 勝呂昭男, 平田　敦, 吉川昌範.  
English: 勝呂昭男, 平田　敦, 吉川昌範.  
Language Japanese 
Journal/Book name
Japanese:1999年度精密工学会春季大会学術講演会講演論文集 
English: 
Volume, Number, Page         pp. 124
Published date 1999 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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