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Title
Japanese:電子ビーム励起プラズマ援用イオンビームスパッタリング法によるDLC膜の作製 
English: 
Author
Japanese: 野口賢次, 平田　敦.  
English: 野口賢次, 平田　敦.  
Language Japanese 
Journal/Book name
Japanese:第13回ダイヤモンドシンポジウム講演要旨集 
English: 
Volume, Number, Page         pp. 82-83
Published date 1999 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
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Conference site
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