無加熱・無加圧による超精密低エネルギー接合におよぼす表面粗さの影響

Publication Information

Title

Japanese:	無加熱・無加圧による超精密低エネルギー接合におよぼす表面粗さの影響
English:	Effect of surface roughness on the heatless and pressureless bonding for low-energy precise processing

Author

Japanese:	高橋邦夫.
English:	KUNIO TAKAHASHI.

Language

Japanese

Journal/Book name

Japanese:	圧力技術
English:	Journal of High Pressure Institute of Japan

Volume, Number, Page

Vol. 35 No. 3 pp. 159

Published date

1997

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: