Simultaneous Determination of Activity Coefficient and Diffusion Coefficient of Boron in Single Cristalline Silicon

Publication Information

Title

Japanese:
English:	Simultaneous Determination of Activity Coefficient and Diffusion Coefficient of Boron in Single Cristalline Silicon

Author

Japanese:	H Fukuyama, J Takasago, K Kawagishi, 須佐匡裕, K Nagata.
English:	H Fukuyama, J Takasago, K Kawagishi, M Susa, K Nagata.

Language

English

Journal/Book name

Japanese:
English:	J.Electroche.Soc.

Volume, Number, Page

Vol. 147 No. 5 pp. 1965-1969

Published date

2000

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: