Hydrothermal method PZT thin film and its application to actuators and sensors | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Hydrothermal method PZT thin film and its application to actuators and sensors

Author

Japanese:	M. K. Kurosawa.
English:	M. K. Kurosawa.

Language

English

Journal/Book name

Japanese:
English:	Proc.in 11th Int. Symp. Integrated Ferroelectrics

Volume, Number, Page

pp. 10I

Published date

1999

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

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