A cylindrical shaped micro ultrasonic motor utilizing PZT thin film (1.4 mm in diameter and 5.0 mm long statro transducer)

Publication Information

Title

Japanese:
English:	A cylindrical shaped micro ultrasonic motor utilizing PZT thin film (1.4 mm in diameter and 5.0 mm long statro transducer)

Author

Japanese:	T. Morita, M. K. Kurosawa, T. Higuchi.
English:	T. Morita, M. K. Kurosawa, T. Higuchi.

Language

English

Journal/Book name

Japanese:
English:	Proc. of Int. Conf. on Solid-state Sensors & Actuators, Transducers 99

Volume, Number, Page

Vol. 2 pp. 1744-1747

Published date

1999

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: