Optimum silicon slider design for 50 MHz SAW linear motor

Publication Information

Title

Japanese:
English:	Optimum silicon slider design for 50 MHz SAW linear motor

Author

Japanese:	M. Takasaki, M. K. Kurosawa, T. Higuchi.
English:	M. Takasaki, M. K. Kurosawa, T. Higuchi.

Language

English

Journal/Book name

Japanese:
English:	Proc. of Int. Conf. on Solid-state Sensors & Actuators, Transducers 99

Volume, Number, Page

Vol. 2 pp. 1756-1757

Published date

1999

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: