Performance of Hydrothermal PZT Film on High Intensity Operation

Publication Information

Title

Japanese:
English:	Performance of Hydrothermal PZT Film on High Intensity Operation

Author

Japanese:	M. K. Kurosawa, H. Yasui, T. Kanda, T. Higuchi.
English:	M. K. Kurosawa, H. Yasui, T. Kanda, T. Higuchi.

Language

English

Journal/Book name

Japanese:
English:	Proc. of IEEE Int. Micro Electro Mechanical Systems Conf.

Volume, Number, Page

pp. 56-61

Published date

2000

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: