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Title
Japanese:電子ビーム励起プラズマ援用イオンビームスパッタリング法によるダイヤモンドライクカーボン膜の気相合成 
English: 
Author
Japanese: 真下尚洋, 野口賢次, 吉川昌範, 平田　敦.  
English: 真下尚洋, 野口賢次, 吉川昌範, 平田　敦.  
Language Japanese 
Journal/Book name
Japanese:精密工学会誌 
English: 
Volume, Number, Page Vol. 66    No. 10    pp. 1621-1625
Published date 2000 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
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Conference site
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