静圧軸受け機構を利用した高速・精密位置決め用エアサーボテーブルの開発

Publication Information

Title

Japanese:	静圧軸受け機構を利用した高速・精密位置決め用エアサーボテーブルの開発
English:	Development of Pneumatic Servo Table for Accurate and Speedy Positioning Mounted Externally Pressurized Air Bearings

Author

Japanese:	藤田壽憲.
English:	TOSHINORI FUJITA.

Language

Japanese

Journal/Book name

Japanese:	油圧と空気圧
English:	Journal of the Japan Hydraulics and Pneumatics Society

Volume, Number, Page

Vol. 28 No. 4 pp. 451-457

Published date

1997

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: