Wet chemical etching for ultra fine periodic structrures ; rectangular InP corrugations of 70nm pitch and 100nm depth

Publication Information

Title

Japanese:
English:	Wet chemical etching for ultra fine periodic structrures ; rectangular InP corrugations of 70nm pitch and 100nm depth

Author

Japanese:	E.Inamura, Y.Miyamoto, S.Tamura, S.Takasugi, K.Furuya.
English:	E.Inamura, Y.Miyamoto, S.Tamura, S.Takasugi, K.Furuya.

Language

English

Journal/Book name

Japanese:
English:	Jpn. J. Appl. Phys.

Volume, Number, Page

Vol. 28 No. 10 pp. 2193

Published date

1989

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: