Fabricution of ultrafine X-ray mask using pricise crystal growth techniqe

Publication Information

Title

Japanese:
English:	Fabricution of ultrafine X-ray mask using pricise crystal growth techniqe

Author

Japanese:	Y.Miyamoto, K.Furuya, D.Yamazaki.
English:	Y.Miyamoto, K.Furuya, D.Yamazaki.

Language

English

Journal/Book name

Japanese:
English:	Jpn. J. Appl. Phys.

Volume, Number, Page

Vol. 31 No. 4A pp. L432

Published date

1992

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: