Wrapped Alignment Mark for fabrication of Interference/Diffraction hot electron devices

Publication Information

Title

Japanese:
English:	Wrapped Alignment Mark for fabrication of Interference/Diffraction hot electron devices

Author

Japanese:	H.Hongo, Y.Miyamoto, J.Suzuki, M.Suhara, K.Furuya.
English:	H.Hongo, Y.Miyamoto, J.Suzuki, M.Suhara, K.Furuya.

Language

English

Journal/Book name

Japanese:
English:	Jpn. J. Appl.Phys.

Volume, Number, Page

Vol. 37 No. 3B pp. 1518

Published date

1998

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: