Loss increase of (LuNdBi)3(FeAl)5O12 films caused by sputter etching

Publication Information

Title

Japanese:
English:	Loss increase of (LuNdBi)3(FeAl)5O12 films caused by sputter etching

Author

Japanese:	H.Yokoi, 水本哲弥, T.Ida, K.Kozakai, Y.Naito.
English:	H.Yokoi, T.Mizumoto, T.Ida, K.Kozakai, Y.Naito.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Vol. 33 No. 11 pp. 6355-6359

Published date

Nov. 1994

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: