Crystalographic Structures and Parasitic Resistance for fully Self-Aligned Metallization Metal-Oxide-Semiconductor Field-Effect-Transistor

Publication Information

Title

Japanese:
English:	Crystalographic Structures and Parasitic Resistance for fully Self-Aligned Metallization Metal-Oxide-Semiconductor Field-Effect-Transistor

Author

Japanese:	C. H. Lee, T. Nishimura, H. Matsuhashi, M. Yokoyama, K. Masu, K. Tsubouchi.
English:	C. H. Lee, T. Nishimura, H. Matsuhashi, M. Yokoyama, K. Masu, K. Tsubouchi.

Language

English

Journal/Book name

Japanese:
English:	Jpn. J. Appl. Phys.

Volume, Number, Page

Vol. 38 No. 10 pp. 5835-5338

Published date

1999

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: