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Publication Information
Title
Japanese:
English:
Crystalographic Structures and Parasitic Resistance for fully Self-Aligned Metallization Metal-Oxide-Semiconductor Field-Effect-Transistor
Author
Japanese:
C. H. Lee, T. Nishimura, H. Matsuhashi, M. Yokoyama,
K. Masu
, K. Tsubouchi.
English:
C. H. Lee, T. Nishimura, H. Matsuhashi, M. Yokoyama,
K. Masu
, K. Tsubouchi.
Language
English
Journal/Book name
Japanese:
English:
Jpn. J. Appl. Phys.
Volume, Number, Page
Vol. 38 No. 10 pp. 5835-5338
Published date
1999
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
©2007
Tokyo Institute of Technology All rights reserved.