Selective Al CVD Technology for ULSI Application

Publication Information

Title

Japanese:
English:	Selective Al CVD Technology for ULSI Application

Author

Japanese:	K. Masu, K. Tsubouchi.
English:	K. Masu, K. Tsubouchi.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of Advanced Metallization for ULSI Applications in 1994

Volume, Number, Page

pp. 477-486

Published date

1995

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: