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Publication Information
Title
Japanese:
English:
Selective Al CVD Technology for ULSI Application
Author
Japanese:
K. Masu
, K. Tsubouchi.
English:
K. Masu
, K. Tsubouchi.
Language
English
Journal/Book name
Japanese:
English:
Proceedings of Advanced Metallization for ULSI Applications in 1994
Volume, Number, Page
pp. 477-486
Published date
1995
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
©2007
Tokyo Institute of Technology All rights reserved.