Dimension-Temperature Combination Scaling for Low-Temperature 0.1μm CMOS

Publication Information

Title

Japanese:
English:	Dimension-Temperature Combination Scaling for Low-Temperature 0.1μm CMOS

Author

Japanese:	K. Masu, M. Yokoyama, K. Tsubouchi.
English:	K. Masu, M. Yokoyama, K. Tsubouchi.

Language

English

Journal/Book name

Japanese:
English:	Microelectronic Device and Multilevel Interconnection Technology, Part of SPIE's Microelectronic Manufacturing '95 Symposium

Volume, Number, Page

pp. 62-73

Published date

1995

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: