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Publication Information
Title
Japanese:
English:
Multilevel Metallization Based on Al CVD
Author
Japanese:
K. Masu
, H. Matsuhashi, A. Gotoh, J.-H. Chung, M. Yokoyama, R. Tajima, Y. Fujita, K. Tsubouchi.
English:
K. Masu
, H. Matsuhashi, A. Gotoh, J.-H. Chung, M. Yokoyama, R. Tajima, Y. Fujita, K. Tsubouchi.
Language
English
Journal/Book name
Japanese:
English:
1996 Symposium on VLSI Technology, Digest of Technical Papers
Volume, Number, Page
pp. 44-45
Published date
1996
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
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Tokyo Institute of Technology All rights reserved.