Multilevel Metallization Based on Al CVD

Publication Information

Title

Japanese:
English:	Multilevel Metallization Based on Al CVD

Author

Japanese:	K. Masu, H. Matsuhashi, A. Gotoh, J.-H. Chung, M. Yokoyama, R. Tajima, Y. Fujita, K. Tsubouchi.
English:	K. Masu, H. Matsuhashi, A. Gotoh, J.-H. Chung, M. Yokoyama, R. Tajima, Y. Fujita, K. Tsubouchi.

Language

English

Journal/Book name

Japanese:
English:	1996 Symposium on VLSI Technology, Digest of Technical Papers

Volume, Number, Page

pp. 44-45

Published date

1996

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: