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Title
Japanese:21世紀の半導体デバイスとリソグラフィ技術 
English: 
Author
Japanese: 大見俊一郎.  
English: SHUN-ICHIRO OHMI.  
Language Japanese 
Journal/Book name
Japanese:電気学会誌 
English: 
Volume, Number, Page Vol. 120    No. 6    pp. 340-343
Published date 2000 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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