Spectroscopic Study on a State of Non-Equilibrium of a Microwave Discharge Nitrogen Plasma Electron, Vibration, and Rotationla Temperatures vs. Discharge Pressure

Publication Information

Title

Japanese:
English:	Spectroscopic Study on a State of Non-Equilibrium of a Microwave Discharge Nitrogen Plasma Electron, Vibration, and Rotationla Temperatures vs. Discharge Pressure

Author

Japanese:	S. Koike, H. Kobori, H. Matsuura, H. Akatsuka.
English:	S. Koike, H. Kobori, H. Matsuura, H. Akatsuka.

Language

English

Journal/Book name

Japanese:
English:	Proc. 15th Intl. Symp. on Plasma Chemistry

Volume, Number, Page

pp. 2099

Published date

2001

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: