Fundamental Characteristics of Pulse-Operated Helium Inductively Coupled Plasma | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Fundamental Characteristics of Pulse-Operated Helium Inductively Coupled Plasma

Author

Japanese:	渡邊正人.
English:	MASATO WATANABE.

Language

English

Journal/Book name

Japanese:
English:	28th IEEE Int.Conf.Plasma Science

Volume, Number, Page

pp. 177

Published date

2001

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

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