Preparation of Soft Magnetic Fe-N Films by Ion Beam Deposition Method with Strict Control of Plasma Potential | Science Tokyo Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Preparation of Soft Magnetic Fe-N Films by Ion Beam Deposition Method with Strict Control of Plasma Potential

Author

Japanese:	中川茂樹.
English:	SHIGEKI NAKAGAWA.

Language

English

Journal/Book name

Japanese:
English:	IEEE Trans. on Magn.

Volume, Number, Page

Vol. MAG-28 No. 5 pp. 2946-2948

Published date

1992

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

©2007 Institute of Science Tokyo All rights reserved.