Effective Suppress of Internal Stress in Co-Cr Films by using Mixture of Ar and Kr as Sputtering Gas | Science Tokyo Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Effective Suppress of Internal Stress in Co-Cr Films by using Mixture of Ar and Kr as Sputtering Gas

Author

Japanese:	中川茂樹.
English:	SHIGEKI NAKAGAWA.

Language

English

Journal/Book name

Japanese:	学術雑誌
English:	J. Magn. Magn. Mat.

Volume, Number, Page

Vol. 120 pp. 345-348

Published date

1993

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

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