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Title
Japanese:対向ターゲット式スパッタ法による垂直磁気テープ用Co-Cr系合金薄膜の内部応力制御法 
English: 
Author
Japanese: 中川茂樹.  
English: SHIGEKI NAKAGAWA.  
Language Japanese 
Journal/Book name
Japanese:学術雑誌 
English:J. Ion Sci. and Tech. (IONICS) 
Volume, Number, Page Vol. 20    No. 9    pp. 147-154
Published date 1994 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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