Control of internal stress of Co-Cr films deposited by facing targets sputtering | Science Tokyo Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Control of internal stress of Co-Cr films deposited by facing targets sputtering

Author

Japanese:	中川茂樹.
English:	SHIGEKI NAKAGAWA.

Language

English

Journal/Book name

Japanese:
English:	IEEE Transactions on Magnetics

Volume, Number, Page

Vol. 26 pp. 1

Published date

1990

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

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