Small d-Spacing and Internal Stress of Co-Cr Films Deposited by Kr Ion Sputtering | Science Tokyo Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Small d-Spacing and Internal Stress of Co-Cr Films Deposited by Kr Ion Sputtering

Author

Japanese:	中川茂樹.
English:	SHIGEKI NAKAGAWA.

Language

English

Journal/Book name

Japanese:
English:	Mat. Res. Soc. Symp. Proc.

Volume, Number, Page

Vol. 231 pp. 335-340

Published date

1991

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

©2007 Institute of Science Tokyo All rights reserved.