Preparation of Soft Magnetic and Thermally stable Fe-Co-Ta : N/Ti mulilayered films by sputter deposition

Publication Information

Title

Japanese:
English:	Preparation of Soft Magnetic and Thermally stable Fe-Co-Ta : N/Ti mulilayered films by sputter deposition

Author

Japanese:	中川茂樹.
English:	SHIGEKI NAKAGAWA.

Language

English

Journal/Book name

Japanese:
English:	Journal of Applied Physics

Volume, Number, Page

Vol. 81 No. 8 pp. 3782-3784

Published date

1997

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: