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Title
Japanese:スパッタ法による磁性膜作製におけるガス種の検討 
English: 
Author
Japanese: 中川茂樹.  
English: SHIGEKI NAKAGAWA.  
Language Japanese 
Journal/Book name
Japanese:表面技術 
English: 
Volume, Number, Page Vol. 49    No. 10    pp. 1078-1082
Published date 1998 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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