Optimaization of slider contact face geometry for surface acoustic wave motor

Publication Information

Title

Japanese:
English:	Optimaization of slider contact face geometry for surface acoustic wave motor

Author

Japanese:	M. K. Kurosawa, H. Itoh, K. Asai, M. Takasaki, T. Higuchi.
English:	M. K. Kurosawa, H. Itoh, K. Asai, M. Takasaki, T. Higuchi.

Language

English

Journal/Book name

Japanese:
English:	Proc. of IEEE Int. Micro Electro Mechanical Systems Conf.Interlaken, Swiss, Jan. 21-25

Volume, Number, Page

pp. 252-255

Published date

2001

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: