Resolution and sensitivity of a longitudinally vibration touch probe sensour using PZT thin film

Publication Information

Title

Japanese:
English:	Resolution and sensitivity of a longitudinally vibration touch probe sensour using PZT thin film

Author

Japanese:	T. Kanda, M. K. Kurosawa, T. Higuchi.
English:	T. Kanda, M. K. Kurosawa, T. Higuchi.

Language

English

Journal/Book name

Japanese:
English:	Ultrasonics International, Delft, July 2-5.

Volume, Number, Page

pp. B1-06

Published date

2001

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: