Estimation of resolution and cnatact force of a longitudinally vibrating touch probe sensor using lead zirconate titanate (PZT) thin-film vibrator

Publication Information

Title

Japanese:
English:	Estimation of resolution and cnatact force of a longitudinally vibrating touch probe sensor using lead zirconate titanate (PZT) thin-film vibrator

Author

Japanese:	T. Kanda, T. Morita, M. K. Kurosawa, T. Higuchi.
English:	T. Kanda, T. Morita, M. K. Kurosawa, T. Higuchi.

Language

English

Journal/Book name

Japanese:
English:	Jpn. J. Appl. Phys.

Volume, Number, Page

Vol. 40, part 1 No. 5B pp. 3646-3651

Published date

2001

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: