NiSi Salicide Technology for Scaled CMOS

Publication Information

Title

Japanese:
English:	NiSi Salicide Technology for Scaled CMOS

Author

Japanese:	H. Iwai, T. Ohguro, S. Ohmi.
English:	H. Iwai, T. Ohguro, S. Ohmi.

Language

English

Journal/Book name

Japanese:
English:	Abstract of European Workshop Materials for Advanced Metallization (MAM2001)

Volume, Number, Page

pp. O7.5

Published date

2001

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: