Gate dielectrics for deep sub-0.1 μm CMOS

Publication Information

Title

Japanese:
English:	Gate dielectrics for deep sub-0.1 μm CMOS

Author

Japanese:	H. Iwai, S. Ohmi.
English:	H. Iwai, S. Ohmi.

Language

English

Journal/Book name

Japanese:
English:	FTM 2001, Scientific Program, 2001 Advanced Research Workshop, Future Trends in Microelectronics: The Nano Millennium

Volume, Number, Page

pp. 45

Published date

2001

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: