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Title
Japanese:高誘電体ゲート絶縁膜技術 
English: 
Author
Japanese: 岩井洋, 大見俊一郎.  
English: 岩井洋, 大見俊一郎.  
Language Japanese 
Journal/Book name
Japanese:半導体・集積回路技術第６０回シンポジウム 
English: 
Volume, Number, Page         pp. 6-11
Published date 2001 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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