EFFECT OF PERIODIC ADDITION OF HYDROGEN GAS ON NITRIDING OF TITANIUM PLATE USING AN RF PLASMA

Publication Information

Title

Japanese:
English:	EFFECT OF PERIODIC ADDITION OF HYDROGEN GAS ON NITRIDING OF TITANIUM PLATE USING AN RF PLASMA

Author

Japanese:	Atsutoshi Makihira, H.Sekiguchi, A.Kanzawa, T.Honda.
English:	Atsutoshi Makihira, H.Sekiguchi, A.Kanzawa, T.Honda.

Language

English

Journal/Book name

Japanese:	第4回プラズマ化学合同シンポジウムアブストラクト集
English:

Volume, Number, Page

pp. 18

Published date

1991

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: