Nano meter stepping drive of surface acoustic wave motor

Publication Information

Title

Japanese:
English:	Nano meter stepping drive of surface acoustic wave motor

Author

Japanese:	T. Shigematsu, M. K. Kurosawa, K. Asai.
English:	T. Shigematsu, M. K. Kurosawa, K. Asai.

Language

English

Journal/Book name

Japanese:
English:	1^st^ IEEE Conf. on Nanotechnology, Maui, Hawaii, Oct. 28-30

Volume, Number, Page

pp. 495-500

Published date

2001

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: