Numerical analysis of high resolution micro-lithography with thermoresist; | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Numerical analysis of high resolution micro-lithography with thermoresist;

Author

Japanese:	Kenji AMAYA:.
English:	Kenji AMAYA:.

Language

English

Journal/Book name

Japanese:
English:	Proc. of SPIE, Emerging Lithographic Technologies III

Volume, Number, Page

Vol. 3676 pp. 360-370

Published date

1999

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

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