Superiority of DMAH to DMEAA for Al CVD Technology

Publication Information

Title

Japanese:
English:	Superiority of DMAH to DMEAA for Al CVD Technology

Author

Japanese:	H. Matsuhashi, C. H. Lee, T. Nishimura, K. Masu, K. Tsubouchi.
English:	H. Matsuhashi, C. H. Lee, T. Nishimura, K. Masu, K. Tsubouchi.

Language

English

Journal/Book name

Japanese:
English:	Materials Science in Semiconductor Processing 2

Volume, Number, Page

pp. 303-308

Published date

1999

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: