Al CVD Technology using DMAH for ULSI Multilevel Interconnection

Publication Information

Title

Japanese:
English:	Al CVD Technology using DMAH for ULSI Multilevel Interconnection

Author

Japanese:	K. Tsubouchi, K. Masu.
English:	K. Tsubouchi, K. Masu.

Language

English

Journal/Book name

Japanese:
English:	International Workshop on Development of Thin Film for Future ULSI's and Nano-Scale Process Integration

Volume, Number, Page

pp. 34

Published date

1998

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: