Superiority of DMAH to DMEAA for Al CVD

Publication Information

Title

Japanese:
English:	Superiority of DMAH to DMEAA for Al CVD

Author

Japanese:	H. Matsuhashi, C. H. Lee, M. Yokoyama, K. Masu, K. Tsubouchi.
English:	H. Matsuhashi, C. H. Lee, M. Yokoyama, K. Masu, K. Tsubouchi.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of Advanced Metallization and Interconnection systems for ULSI Applications in 1997

Volume, Number, Page

pp. 205-210

Published date

1998

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: