Mirror-Like Surface Morphology of CVD-Al on TiN by ClF<sub>3</sub> Pretreatment

Publication Information

Title

Japanese:
English:	Mirror-Like Surface Morphology of CVD-Al on TiN by ClF₃ Pretreatment

Author

Japanese:	H. Matsuhashi, A. Gotoh, J. H. Chung, K. Masu, K. Tsubouchi.
English:	H. Matsuhashi, A. Gotoh, J. H. Chung, K. Masu, K. Tsubouchi.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of Advanced Metallization and Interconnect Systems for ULSI Applications in 1995

Volume, Number, Page

pp. 667-673

Published date

1996

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: